GEOMETRIC MEASUREMENT

Providing a comprehensive inspection solution specialized in panel thickness reduction and micro via size reduction trends in packaging processes by applying a light-transmitting vacuum suction table

High-speed measurement of surface shape (warpage) of measurement target

Non-contact precision measurement of the shape of a micro-pattern formed on the upper surface of a substrate

Recognizes a specific type of pattern and converts the pattern location into reference coordinates

Equipment for precisely measuring the distance and size between specified patterns

Measurement of the coefficient of thermal expansion of the substrate according to temperature change

Non-contact measurement of surface roughness of the target surface