PROJECTS

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PROJECTS

GEOMETRIC MEASUREMENT

Non-contact surface roughness measurement

작성자 관리자 날짜 2024-08-26 11:05:31 조회수 98
Non-contact measurement of surface roughness of the target surface
Application Cases

Sensor Type

   - VSI / Confocal chromatic

Measurement Target

   - Surface roughness measurement of wafer surface after process

Sensor Resolution

   - 2nm / 3nm

Measurement Area

   - 870µm x655µm (VSI)

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