PROJECTS

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PROJECTS

GEOMETRIC MEASUREMENT

Pattern profile measurement

작성자 관리자 날짜 2024-08-26 11:30:56 조회수 77
Non-contact precision measurement of the shape of a micro-pattern formed on the upper surface of a substrate
Application Cases

Sensor type

   - Confocal chromatic

Measurement target

   - Measurement of metal pattern shape generated on wafer

Sensor resolution

   - 10nm

Step measurement height

   - < 250µm

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