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GEOMETRIC MEASUREMENT

Micro Via Inspection Equipment

작성자 관리자 날짜 2024-08-26 11:38:16 조회수 253
Providing a comprehensive inspection solution specialized in panel thickness reduction and micro via size reduction trends in packaging processes by applying a light-transmitting vacuum suction table
Application Cases
Item Classification Specification Note
Inspection target Via Type Through hole, blind hole  
Maximum size < 4㎜  
Minimum size > 20㎛  
Maximum quantity < 100,000,000 ea  
Position resolution X, Y, Z 0.05㎛  
Inspection camera Type 18K, 256TDI Line CCD  
Number of cameras 1ea option : dual camera
Auxiliary camera Type 10M CCD  
Number of cameras 1ea  
Inspection Panel Maximum size 450㎜ X 550㎜ option : 550㎜ X 650㎜
Minimum size > 0.02㎜  
Maximum thickness < 2㎜  
Maximum weight < 1.2Kg Automatic loader option applied
Automatic Panel Loader Applicability possible