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| Item | Classification | Specification |
| Mounting Head |
No. of spindle | 1ea |
| Force Control Range | 2~10N | |
| X,Y resolution | Repeatability ±3.0um @1σ | |
| Tilt resolution | Repeatability ±0.05˚ @3σ | |
| Inspection | Dispensing | Position and discharge amount after dispensing |
| Pickup | Pre-pickup location inspection | |
| Mounting | Position during mounting |